Be enhanced by minimizing the size tion mass. The low frequencyBe enhanced by minimizing the

Be enhanced by minimizing the size tion mass. The low frequency
Be enhanced by minimizing the size tion mass. The low frequency response may be enhanced by minimizing the size of your gaps from the gaps between the triangular plates. Every single triangular plate can be driven by an among the triangular plates. Each and every triangular plate can be driven by an inner electrode inner electrode and an outer electrode with a 180 phase distinction to actuate the piston and an outer electrode with a 180phase difference to actuate the piston mode of the diamode in the diaphragm to raise the SPL. Measurements showed a SPL enhancement phragm to improve the SPL. Measurements showed a SPL enhancement of 9.five dB under of 9.five dB under the Buformin Formula dual-electrode driving in comparison together with the single (inner or outer) the dual-electrode driving in comparison using the single (inner or outer) electrode drivelectrode driving. ing.Figure Schematics of piezoelectric MEMS speakers with special electrode configurations. (a) Circular inter-digitated Figure 10. 10. Schematics of piezoelectric MEMSspeakers with unique electrode configurations. (a) Circular inter-digitated electrode (Reproduced with permission from Springer [23]). (b) Triangular plates with dual electrode (Reproduced with electrode (Reproduced with permission from Springer [23]). (b) Triangular plates with dual electrode (Reproduced with permission from IEEE [56]). (c) Circular diaphragm with dual electrode (Reproduced with permission from IEEE [24]). permission from IEEE [56]). (c) Circular diaphragm with dual electrode (Reproduced with permission from IEEE [24]).Along with the 180out-of-phase, other phase variations dual-electrode driving In addition to the 180 out-of-phase, other phase differences inin dual-electrode driving and their influenceson the SPL improvementof piezoelectric MEMS speakers happen to be and their influences around the SPL improvement of piezoelectric MEMS speakers have already been studied. In 2021, Wang et al. presented a ceramic PZT-based piezoelectric MEMS Sunset Yellow FCF Purity speaker studied. In 2021, Wang et al. presented a ceramic PZT-based piezoelectric MEMS speaker together with the SPL improved by dual-electrode driving and studied the effects phase phase using the SPL improvedby dual-electrode driving and studied the effects of theof the difference at various frequencies [24]. As shown in Figure 10c, the reported MEMS speaker distinction at unique frequencies [24]. As shown in Figure 10c, the reported MEMS speaker consists of an inner circular electrode consists of an inner circular electrode and an outer ring-shaped electrode. By applying and an outer ring-shaped electrode. By applying sine waves on these two electrodes having a phase difference tuned from 0to 360in the sine waves on these two electrodes with a phase difference tuned from 0 to 360 in the experiments, the measurement results revealed that the SPL changed drastically with experiments, the measurement benefits revealed that the SPL changed significantly using the the phase distinction and was frequency dependent, peaking at distinctive phase differences phase difference and was frequency dependent, peaking at different phase variations for for distinct frequencies. Together with the optimal phase variations, a 20 dB SPL improvement diverse frequencies. With the optimal phase variations, a 20 dB SPL improvement can could be achieved in the frequency band spanning from 600 Hz to 10 kHz, compared with be achieved in the frequency band spanning from 600 Hz to 10 kHz, compared together with the the single-electrode driving process. single-elect.